300 sqrm clean room (class 10 - 10000) with complete Si wafer processing line. Actually set for 3inch diameter (4inch is optional )

50 sqrm mask laboratory (class 100) for chromium masks up to 5inch.
Mask processing with resolution of 1micron.

Alkaline and porous Si bulk micromachining

Mounting and encapsulation

Device testing and electrical characterization