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Facilities


Patterning

  • Mask shop - 1 micrometer resolution

   ¤ Laser Pattern Generator
   ¤ Chromium mask design and manufacturing (4 - 7 inch)
   ¤ Direct wafer writing (3 - 6 inch)

  • Optical Lithography - 1 micrometer resolution

   ¤ Substracting patterning
   ¤ Lift-off patterning
   ¤ High aspect ratio SU-8 photoresist
   ¤ Double side alignment
   ¤ Prebond wafer alignment

  • E-beam Lithography - Resolution below 20 nanometer (4-6 inch wafer)

Thin Film Deposition    

  • Chemical
  • Physical
     

CMOS Related Technologies    

  • Ion Implantation    
  • High Temperature Pocesses

Chemical Processes    

  • Wet 
  • Dry
     

System Integration    

  • Polymer Technology
  • Packaging
     

Functional Analysis    

Simulation

  • Technology and process simulations
  • Monte-Carlo process simulation
  • Device simulation
  • Spice circuit modelling
  • Finit element modelling: mechanical, thermal, electric, fluid, dynamical, coupled modelling.

Characterization

  • Electrical
  • Surface profiling
  • SEM, TEM, AFM, EDS
  • Functional tests: mechanical, chemical, biochemical, fluidical, etc.