Development and small scale production of Si piezoresistive and
capacitive pressure sensors and transducers [with
WESZTA-T]
PC controlled current generators and anodisation cells for porous
silicon processing (up to 6inch wafers and 10x10sqrcm rectangular
crystals)
3" and 4" Si wafer processing
Extra features: low stress silicon-nitride deposition, porous silicon
single and multilayers |