Facilities
Patterning
- Mask shop - 1 micrometer resolution
¤ Laser Pattern Generator
¤ Chromium mask design and manufacturing (4 - 7 inch)
¤ Direct wafer writing (3 - 6 inch)
- Optical Lithography - 1 micrometer resolution
¤ Substracting patterning
¤ Lift-off patterning
¤ High aspect ratio SU-8 photoresist
¤ Double side alignment
¤ Prebond wafer alignment
- E-beam Lithography - Resolution below 20 nanometer (4-6 inch wafer)
Thin Film Deposition
- Chemical
- Physical
CMOS Related Technologies
- Ion Implantation
- High Temperature Pocesses
Chemical Processes
- Wet
- Dry
System Integration
- Polymer Technology
- Packaging
Functional Analysis
Simulation
- Technology and process simulations
- Monte-Carlo process simulation
- Device simulation
- Spice circuit modelling
- Finit element modelling: mechanical, thermal, electric, fluid, dynamical, coupled modelling.
Characterization
- Electrical
- Surface profiling
- SEM, TEM, AFM, EDS
- Functional tests: mechanical, chemical, biochemical, fluidical, etc.